专利名称:Method for growing a single crystal of
compound semiconductor
发明人:Morioka, Mikio c/o Itami Works,Shimizu,
Atsushi c/o Itami Works
申请号:EP85304484.0申请日:19850624公开号:EP0172621A2公开日:19860226
摘要:Highly impurity doped single crystal often suffers from impurity precipitation.The cause of the occurrence of impurity precipitation is supposed to be the supercooling.To avoid the occurrence of supercooling the pulling speed is slowly lowered during thecrystal growth in the LEC methods. The beginning of the occurrence of impurity
precipitation is delayed by lowering the pulling speed. Additional application of magneticfield is more effective.
申请人:SUMITOMO ELECTRIC INDUSTRIES LIMITED
地址:No. 15, Kitahama 5-chome, Higashi-ku Osaka-shi, Osaka 1 JP
国籍:JP
代理机构:Evans, David Charles
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