专利名称：Measurement and endpointing of sample
thickness
发明人：Young, Richard,Peterson, Brennan,Moriarty,
Michael,Schampers, Ruud
申请号：EP11165381.2申请日：20091102公开号：EP2367195A2公开日：20110921
专利附图：
摘要：An improved method for TEM sample creation. The use of a SEM-STEM
detector in the dual-beam FIB/SEM allows a sample to be thinned using the FIB, while the
STEM signal is used to monitor sample thickness. A preferred embodiment of thepresent invention can measure the thickness of or create S/TEM samples by using aprecise endpoint detection method that is reproducible and suitable for automation.Preferred embodiments also enable automatic endpointing during TEM lamella creationand provide users with direct feedback on sample thickness during manual thinning.Preferred embodiments of the present invention thus provide improved methods forendpointing sample thinning and methods to partially or fully automate endpointing toincrease throughput and reproducibility of TEM sample creation.
申请人：FEI Company
地址：5350 NE Dawson Creek Drive Hillsboro, OR 97124-5793 US
国籍：US
代理机构：Bakker, Hendrik
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