专利名称：Measurement and endpointing of sample
thickness
发明人：Richard J. Young,Brennan Peterson,Rudolf
Johannes Peter Gerardus Schampers,MichaelMoriarty
申请号：US13441465申请日：20120406公开号：US09184025B2公开日：20151110
专利附图：
摘要：A method for Transmission Electron Microscopy (TEM) sample creation. The use
of a Scanning Electron Microscope (SEM)—Scanning Transmission Electron Microscope(STEM) detector in the dual-beam focused ion beam (FIB)/SEM allows a sample to bethinned using the FIB, while the STEM signal is used to monitor sample thickness. Apreferred embodiment of the present invention can measure the thickness of or createTEM and STEM samples by using a precise endpoint detection method. Preferredembodiments also enable automatic endpointing during TEM lamella creation andprovide users with direct feedback on sample thickness during manual thinning.
Preferred embodiments of the present invention thus provide methods for endpointingsample thinning and methods to partially or fully automate endpointing.
申请人：Richard J. Young,Brennan Peterson,Rudolf Johannes Peter GerardusSchampers,Michael Moriarty
地址：Beaverton OR US,Portland OR US,Belfeld NL,Portland OR US
国籍：US,US,NL,US
代理机构：Scheinberg & Associates, PC
代理人：Michael O. Scheinberg,John E. Hillert
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